E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded

E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - SupersededE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,

and professionals with elementary background in science and knowledge of operating computers

SEMI E148-1109 (Reapproved 0614)

This document covers requirements for dichlorosilane (SiH2Cl2) used in the semiconductor industry

SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)

and density

This Safety Guideline covers essential safety issues for load ports and wafer handling robots

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

even for the same type of resist

or are looking for company-wide access

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Traceability Requirements

This Standard will provide references to metrologies to indirectly assess pad density